| Surface Quality | 20/10(Before coating) 40/20(After coating) |
| Flatness | <λ/8@633nm |
| Wavefront Distortion | <λ/6@633nm |
| Parallelism | <30” |
| Perpendicularity | <15’ |
| Chamfer | <0.25’ |
| Surface Quality | 20/10(Before coating) 40/20(After coating) |
| Flatness | <λ/8@633nm |
| Wavefront Distortion | <λ/6@633nm |
| Parallelism | <30” |
| Perpendicularity | <15’ |
| Chamfer | <0.25’ |
